Browsing by Subject "Patterning"
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Item Lithographic patterning of polymeric media for biotechnology applications(2013-12) Deschner, Ryan Phillip; Willson, C. G. (C. Grant), 1939-; Ellington, Andrew; Ellison, Christopher; Bonnecaze, Roger; Korgel, BrianLithographic patterning has heavily utilized in the semiconductor industry for its ability to pattern vast numbers of complex shapes down to the nanometer scale. However, only recently has this technology been employed in the biotechnology field despite the fact that most of that the most important biological components such as cells, antibodies, DNA and proteins operate at this level. This work is an exploration of the use of lithographic printing methods in two areas deeply-entrenched in biotechnology: self assembly and microarray-based manipulation of biological media. It was inspired by the natural self assembly which occurs in nature and in our bodies at all scales. The majority of this work dealt with the patterning of bioreactive copolymers into different three-dimensional microshapes which could be functionalized with single strands of DNA for subsequent sequence-specific particle assembly. This type of technology, where very small-scale matter can be directed to self assembly into programmed macrostructures in a highly-specific manner has the capability to be adapted for many next-generation applications in drug delivery, nanofabrication, biosensing, and microelectronics. A secondary technology was explored in this work involving the paired sequencing of antibody gene sequences with the aid of lithographically-patterned microarrays. This methodology represents a bridging of bottom-up fabrication methods of DNA and proteins with top-down optical fabrication techniques which is already finding increasing utility in applications such as vaccine discovery, diagnostics, and autoimmune research. Because of the versatile nature of the components of this research, it is the hope of the author that the techniques discovered and explored here provide support and inspiration for future research in the biotechnology field as well as in other fields which may benefit as well.Item Lithography variability driven cell characterization and layout optimization for manufacturability(2011-05) Ban, Yong Chan; Pan, David Z.; Abraham, Jacob; Touba, Nur; Lucas, Kevin; Orshansky, MichaelStandard cells are fundamental circuit building blocks designed at very early design stages. Nanometer standard cells are prone to lithography proximity and process variations. How to design robust cells under variations plays a crucial role in the overall circuit performance and yield. This dissertation studies five related research topics in design and manufacturing co-optimization in nanometer standard cells. First, a comprehensive sensitivity metric, which seamlessly incorporates effects from device criticality, lithographic proximity, and process variations, is proposed. The dissertation develops first-order models to compute these sensitivities, and perform robust poly and active layout optimization by minimizing the total delay sensitivity to reduce the delay under the nominal process condition and by minimizing the performance gap between the fastest and the slowest delay corners. Second, a new equivalent source/drain (S/D) contact resistance model, which accurately calculates contact resistances from contact area, contact position, and contact shape, is proposed. Based on the impact of contact resistance on the saturation current, robust S/D contact layout optimization by minimizing the lithography variation as well as by maximizing the saturation current without any leakage penalty is performed. Third, this dissertation describes the first layout decomposition methods of spacer-type self-aligned double pattering (SADP) lithography for complex 2D layouts. The favored type of SADP for complex logic interconnects is a two-mask approach using a core mask and a trim mask. This dissertation describes methods for automatically choosing and optimizing the manufacturability of base core mask patterns, generating assist core patterns, and optimizing trim mask patterns to accomplish high quality layout decomposition in SADP process. Fourth, a new cell characterization methodology, which considers a random (line-edge roughness) LER variation to estimate the device performance of a sub-45nm design, is presented. The thesis systematically analyzes the random LER by taking the impact on circuit performance due to LER variation into consideration and suggests the maximum tolerance of LER to minimize the performance degradation. Finally, this dissertation proposes a design aware LER model which claims that LER is highly related to the lithographic aerial image fidelity and the neighboring geometric proximity. With a new LER model, robust LER aware poly layout optimization to minimize the leakage power is performed.Item Micro/nano-patterning of supported lipid bilayers: biophysical studies and membrane-associated species separation(2009-05-15) Shi, JinjunMicro/nano-patterning of supported lipid bilayers (SLBs) has shown considerable potential for addressing fundamental biophysical questions about cell membrane behavior and the creation of a new generation of biosensors. Herein are presented several novel lithographic methods for the size-controlled patterning of SLBs from the microscale to the nanoscale. Using these methods, chemically distinct types of phospholipid bilayers and/or Escherichia Coli (E. Coli) membranes can be spatially addressed on a single microchip. These arrays can, in turn, be employed in the studies of multivalent ligand-receptor interactions, enzyme kinetics, SLBs size limitation, and membrane-associated species separation. The investigations performed in the Laboratory for Biological Surface Science include the following projects. Chapters II and III describe the creation of lab-on-a-chip based platforms by patterning SLBs in microfluidic devices, which were employed in high throughput binding assays for multivalent ligand-receptor interactions between cholera toxin B subunits (CTB) and ganglioside GM1. The studies on the effect of ligand density for multivalent CTB-GM1 interactions revealed that the CTB-GM1 binding weakened with increasing GM1 density. Such a result can be explained by the clustering of GM1 on the supported phospholipid membranes, which in turn inhibits the binding of CTB. Chapter IV characterizes the enzymatic activity of phosphatase tethered to SLBs in a microfluidic device. Higher turnover rate and catalytic efficiency were observed at low enzyme surface densities, ascribing to the low steric crowding hindrance and high enzyme fluidity, as well as the resulting improvement of substrate accessibility and affinity of enzyme catalytic sites. Chapter V presents sub-100 nm patterning of supported biomembranes by atomic force microscopy (AFM) based nanoshaving lithography. Stable SLBs formed by this method have a lower size limit of ~ 55 nm in width. This size limit stems from a balance between a favorable bilayer adhesion energy and an unfavorable bilayer edge energy. Finally, chapter VI demonstrates the electrophoretic separation of membrane-associated fluorophores in polymer-cushioned lipid bilayers. This electrophoretic method was applied to the separation of membrane proteins in E. Coli ghost membranes.Item Photodirecting surface energy driven Marangoni convection to pattern thin polymer films(2016-08) Kim, Chae Bin; Ellison, Christopher J.; Bonnecaze, Roger T; Willson, Carlton G; Sanchez, Isaac C; Li, WeiSignificant research effort in the last several decades has been devoted to controlling surface topography at different length scales. Especially important are the micro- to nano-meter length scales because of their overarching importance in a variety of applications including cell biology, tissue engineering, coatings, optics, and microelectronics. While the requirements of many applications are well-served by conventional patterning methods such as photolithography and contact printing, there still remains a need for processes possessing eco-friendly and non-contact fabrication steps. These aspects are particularly crucial in laboratory and industrial settings where access to expensive clean room infrastructure, use of toxic developing solvents, and etching protocols required for conventional methods are often not readily available. Bearing the aforementioned perspective in mind, my research topic has been focused on developing a new polymer film patterning method by photodirecting Marangoni flow in thin films. The Marangoni effect causes liquids to flow towards localized regions of higher surface tension. In a thin film, such flow results in smooth thickness variations and may represent a practically useful route to manufacture topographically patterned surfaces. This document describes my research efforts first focused on fundamentally understanding the Marangoni effect. This fundamental understanding is then exploited for developing and optimizing a number of different materials and processing protocols that enable generalization of the approach as a polymer film patterning method. Finally, taking these findings in entirety, this thesis suggests this eco-friendly and non-contact fabrication approach could potentially be implemented in high-throughput manufacturing environments.