Simulation and estimation of copper electroplating using level set methods and image processing techniques
dc.creator | Carr, Nan Zhou | |
dc.date.accessioned | 2016-11-14T23:29:55Z | |
dc.date.available | 2011-02-18T22:13:37Z | |
dc.date.available | 2016-11-14T23:29:55Z | |
dc.date.issued | 2002-05 | |
dc.degree.department | Mechanical Engineering | en_US |
dc.description.abstract | Not available. | |
dc.format.mimetype | application/pdf | |
dc.identifier.uri | http://hdl.handle.net/2346/17801 | en_US |
dc.language.iso | eng | |
dc.publisher | Texas Tech University | en_US |
dc.rights.availability | Unrestricted. | |
dc.subject | Level set methods | en_US |
dc.subject | Semiconductor industry -- Quality control | en_US |
dc.subject | Semiconductors -- Defects | en_US |
dc.subject | Copper plating -- Simulation | en_US |
dc.subject | Semiconductors -- Design and construction | en_US |
dc.subject | Image processing | en_US |
dc.subject | Computer vision | en_US |
dc.subject | Electroplating | en_US |
dc.title | Simulation and estimation of copper electroplating using level set methods and image processing techniques | |
dc.type | Dissertation |