Observations while attempting to fabricate a micro-electron detection system

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dc.contributorOverzet, Lawrence
dc.contributorGoeckner, Matthew
dc.date.accessioned2017-03-31T21:14:15Z
dc.date.accessioned2018-02-16T18:48:31Z
dc.date.available2017-03-31T21:14:15Z
dc.date.available2018-02-16T18:48:31Z
dc.date.created2017-03-31T21:14:15Z
dc.date.issued2016-12
dc.description.abstract
dc.identifierhttp://hdl.handle.net/10735.1/5355
dc.identifier.urihttp://hdl.handle.net/10735.1/5355
dc.languageen
dc.subjectMicroelectromechanical systems
dc.subjectElectrons—Emission
dc.subjectHydrofluoric acid
dc.subjectChemical reactions
dc.subjectMechanical chemistry
dc.subjectPhotolithography
dc.titleObservations while attempting to fabricate a micro-electron detection system
dc.typeThesis

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University of Texas at Dallas