Applications of neural networks in IC lithography

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dc.creatorMahendra, Manisha
dc.date.accessioned2016-11-14T23:16:52Z
dc.date.available2011-02-18T20:46:26Z
dc.date.available2016-11-14T23:16:52Z
dc.date.issued1995-05
dc.degree.departmentEngineering (General)en_US
dc.description.abstractNot available
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/2346/14694en_US
dc.language.isoeng
dc.publisherTexas Tech Universityen_US
dc.rights.availabilityUnrestricted.
dc.subjectIntegrated circuits -- Computer simulationen_US
dc.subjectNeural networksen_US
dc.subjectElectron beamen_US
dc.subjectLithographyen_US
dc.titleApplications of neural networks in IC lithography
dc.typeThesis

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