Advanced lithographic patterning technologies : materials and processes

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dc.contributor.advisorWillson, C. G. (C. Grant), 1939-en
dc.creatorTaylor, James Christopher, 1980-en
dc.date.accessioned2011-08-18T18:38:07Zen
dc.date.accessioned2017-05-11T22:23:17Z
dc.date.available2011-08-18T18:38:07Zen
dc.date.available2017-05-11T22:23:17Z
dc.date.issued2007-05en
dc.descriptiontexten
dc.description.departmentChemical Engineeringen
dc.format.mediumelectronicen
dc.identifier.urihttp://hdl.handle.net/2152/13214en
dc.language.isoengen
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subjectLithographyen
dc.subjectPhotoresistsen
dc.subjectPhotonic crystalsen
dc.titleAdvanced lithographic patterning technologies : materials and processesen

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