Characterization of fluorinated hydrogenated amorphous silicon nitride alloys

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dc.creatorShen, Jin Miao
dc.date.accessioned2016-11-14T23:09:46Z
dc.date.available2011-02-18T23:55:59Z
dc.date.available2016-11-14T23:09:46Z
dc.date.issued1995-08
dc.description.abstractNot available
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/2346/20791en_US
dc.language.isoeng
dc.publisherTexas Tech Universityen_US
dc.rights.availabilityUnrestricted.
dc.subjectAbsorption spectra
dc.subjectSilicon -- Defects -- Spectra
dc.subjectAmoarphous semiconductors -- Defects -- Spectra
dc.titleCharacterization of fluorinated hydrogenated amorphous silicon nitride alloys
dc.typeDissertation

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