Advanced lithographic patterning technologies: materials and processes

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dc.contributor.advisorWillson, C. G. (C. Grant), 1939-en
dc.creatorTaylor, James Christopheren
dc.date.accessioned2008-08-28T23:23:49Zen
dc.date.accessioned2017-05-11T22:17:40Z
dc.date.available2008-08-28T23:23:49Zen
dc.date.available2017-05-11T22:17:40Z
dc.date.issued2007en
dc.descriptiontexten
dc.description.departmentChemical Engineeringen
dc.format.mediumelectronicen
dc.identifierb68669343en
dc.identifier.oclc166395621en
dc.identifier.urihttp://hdl.handle.net/2152/3040en
dc.language.isoengen
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subject.lcshLithographyen
dc.subject.lcshPhotoresistsen
dc.subject.lcshPhotonic crystalsen
dc.titleAdvanced lithographic patterning technologies: materials and processesen
dc.type.genreThesisen

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