Mems atomic force microscope
dc.contributor.committeeChair | Dallas, Timothy E. J. | |
dc.contributor.committeeMember | Bayne, Stephen B. | |
dc.creator | Kolluru, Surya K. K. | |
dc.date.accessioned | 2016-11-14T23:11:33Z | |
dc.date.available | 2011-01-11T15:54:16Z | |
dc.date.available | 2016-11-14T23:11:33Z | |
dc.date.issued | 2010-12 | |
dc.degree.department | Electrical Engineering | |
dc.description.abstract | This thesis presents the design, development, and testing MEMS based Atomic Force Microscope (AFM). The system is capable of measuring the pull-off force measurements on different surfaces. The design is capable of producing a verticalresolution of ~ 2nm. The MEMS AFM consists of a stand-alone optical head, stepper motor controlled Z stage assembly incorporated with a MEMS XY stage. The shaft end of the stepper motor has a worm gear attached, which takes care of the Z movement.A commercial piezo actuator from Noliacis used. A LabView-based system is used to control the entire assembly. Custom made piezo amplifiers and transimpedance amplifiers are developed. The MEMS-based AFM has significance in finding the adhesion forces of a surface estimating the surface energy present on the surface. Surface forces in the order of ~21Nn and ~ 11nN are measured for a bare silicon substrate and hydrophobic coated MEMS XY stage. In addition, the results obtained are compared with the results of the force measurements performed on a commercial AFM system (Park XE-100). The signal to noise ratio for the system is calculated and is found to be 40 dB. | |
dc.format.mimetype | application/pdf | |
dc.identifier.uri | http://hdl.handle.net/2346/ETD-TTU-2010-12-1197 | |
dc.language.iso | eng | |
dc.rights.availability | Unrestricted. | |
dc.subject | Atomic force microscope | |
dc.title | Mems atomic force microscope | |
dc.type | Thesis |