A generic real-time process control system

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dc.creatorArrant, Edwin Keith
dc.date.accessioned2016-11-14T23:09:52Z
dc.date.available2011-02-19T00:00:04Z
dc.date.available2016-11-14T23:09:52Z
dc.date.issued1989-12
dc.degree.departmentElectrical and Computer Engineeringen_US
dc.description.abstractA major problem facing manufacturers is the design and implementation of flexible automation systems. This problem is complicated by the many differing requirements for automated systems. Every facility has its own specific requirements; therefore, a generic factory control system design could provide the flexibility and adaptability to solve a wide variety of automation needs. Since factory automation systems are implemented from the bottom up, it is necessary to ensure that the initial automated subsystems are going to be compatible with future system enhancements. This thesis describes the various levels of factory automation and establishes a functional specification for each subsystem in the automated facility. These specifications provide the general information required to define the design objectives for the facility subsystems. The first step toward obtaining a solution to the automation problem is to develop a generic software control system for process equipment. A first-generation control system has been developed and applied to a four-module HF vapor etcher system, used in the processing of semiconductor wafers.
dc.format.mimetypeapplication/pdf
dc.identifier.urihttp://hdl.handle.net/2346/20903en_US
dc.language.isoeng
dc.publisherTexas Tech Universityen_US
dc.rights.availabilityUnrestricted.
dc.subjectProcess controlen_US
dc.subjectAutomationen_US
dc.subjectAutomatic controlen_US
dc.titleA generic real-time process control system
dc.typeThesis

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