Catalyst diffusion in positive-tone chemically amplified photoresists

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dc.contributor.advisorWillson, C. G. (C. Grant), 1939-en
dc.creatorStewart, Michael Deanen
dc.date.accessioned2008-08-28T21:41:16Zen
dc.date.accessioned2017-05-11T22:16:04Z
dc.date.available2008-08-28T21:41:16Zen
dc.date.available2017-05-11T22:16:04Z
dc.date.issued2003en
dc.descriptiontexten
dc.description.departmentChemical Engineeringen
dc.format.mediumelectronicen
dc.identifierb57231217en
dc.identifier.oclc56975151en
dc.identifier.proqst3122798en
dc.identifier.urihttp://hdl.handle.net/2152/965en
dc.language.isoengen
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subject.lcshPhotoresistsen
dc.subject.lcshMicrolithographyen
dc.titleCatalyst diffusion in positive-tone chemically amplified photoresistsen
dc.type.genreThesisen

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