Test and characterization of engineering nanocoatings for mems and nanoenergetic materials

dc.contributor.committeeChairDallas, Timothy E. J.
dc.contributor.committeeMemberGale, Richard O.
dc.contributor.committeeMemberPantoya, Michelle
dc.contributor.committeeMemberWeeks, Brandon L.
dc.contributor.committeeMemberHase, William L.
dc.contributor.committeeMemberYeo, Changdong
dc.creatorVijayasai, Ashwin
dc.degree.departmentElectrical and Computer Engineering
dc.description.abstractThis dissertation presents the development, test and characterization of engineered nanocoatings for MEMS and nano-energetic reactive materials. Surface modification on MEMS and nano-energetic reactive materials are developed using a commercially available nanocoating tool. Surface modifications include Chemical Vapor Deposition of Fluorocarbon SAM and nanoparticles and Atomic Layer Deposition of thin oxides. Detailed descriptions of the nanocoating process and their chemical reactions are explained. An F-SAM coated MEMS tribogauge is characterized to estimate the adhesive and frictional forces. In-situ frictional measurements were made. Increasing adhesion force was observed for increasing number of load cycles. The tribogauge is later used as an ex-situ characterization tool to observe the performance of various nanocoating recipes for F-SAM coating. Characterization of the tribogauge is performed using an electronic sense tool. Contact angle goniometer was used to characterize the performance of various recipes. Various types of nanocoatings were deposited on witness samples and nano-energetic materials. A comparison study of underwater combustion tests were made on these thermite pellets. An aging study was performed on both nanocoated witness samples and pellets. The aging experiment is performed by submerging them in de-ionized water for 10 days. Contact angle goniometer and few optical microscopes were used to characterize the performance of various recipes. Apart from the nanocoating based projects, this dissertation briefly explains other projects that were part of the graduate program. A brief description and initial results of a few MEMS device designs are explained in this dissertation. As part of future work new MEMS devices were designed that will allow follow-up nanocoatings projects.
dc.subjectMicroelectromechanical systems
dc.subjectNanostructured materials
dc.subjectElectrical engineering
dc.subjectMaterials science
dc.titleTest and characterization of engineering nanocoatings for mems and nanoenergetic materials