Study and simulation of the predictive proportional integral controller in comparison with proportional integral derivative controllers for a two-zone heater system
| dc.creator | Mannath, Deepa Thomas | |
| dc.date.accessioned | 2016-11-14T23:10:26Z | |
| dc.date.available | 2011-02-19T00:24:38Z | |
| dc.date.available | 2016-11-14T23:10:26Z | |
| dc.date.issued | 2002-12 | |
| dc.degree.department | Electrical and Computer Engineering | en_US |
| dc.description.abstract | The PID algorithm is the most popular feedback controller used within the process industries. This is the algorithm that is currently used on a System in the DSM (Dielectric Systems and Modules) and the CMD (Contact Metal Deposition) groups at Applied Materials Inc. The current Algorithm which controls the Ceramic heater in the LPCVD (Low Pressure Chemical Vapor Deposition) and TTN (Titanium TiNitride) chambers, had problems, which lead to non-uniform heating. After examining and listing the problems, it has been concluded that the Predictive Proportional Integral (PPI) mode of control would provide adequate solutions. In this project we have studied the heater systems, modeled them and carried out simulations in Simulink. The results of the simulation were then used to place Software Requests so that necessary software changes in the Control Algorithm could be made. | |
| dc.format.mimetype | application/pdf | |
| dc.identifier.uri | http://hdl.handle.net/2346/21551 | en_US |
| dc.language.iso | eng | |
| dc.publisher | Texas Tech University | en_US |
| dc.rights.availability | Unrestricted. | |
| dc.subject | Heating -- Control | en_US |
| dc.subject | PID controllers -- Computer simulation | en_US |
| dc.subject | Predictive control -- Computer simulation | en_US |
| dc.title | Study and simulation of the predictive proportional integral controller in comparison with proportional integral derivative controllers for a two-zone heater system | |
| dc.type | Thesis |