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dc.degree.departmentElectrical and Computer Engineeringen_US
dc.rights.availabilityUnrestricted.
dc.creatorSivaraman, Gangadharan
dc.date.accessioned2016-11-14T23:14:37Z
dc.date.available2011-02-18T19:56:33Z
dc.date.available2016-11-14T23:14:37Z
dc.date.issued2003-12
dc.identifier.urihttp://hdl.handle.net/2346/12436en_US
dc.description.abstractNot available
dc.format.mimetypeapplication/pdf
dc.language.isoeng
dc.publisherTexas Tech Universityen_US
dc.subjectDielectric resonators -- Testingen_US
dc.subjectFourier transform infrared spectroscopy (FTIR)en_US
dc.subjectPhotoresists -- Experimentsen_US
dc.subjectSupercritical fluidsen_US
dc.subjectBreakdown (Electricity)en_US
dc.titleSupercritical carbon dioxide treatment of photoresists and plasma-damaged nanoporous low-k films
dc.typeThesis


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