Browsing by Subject "Silicon photonics"
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Item Multi-layer silicon photonic devices for on-chip optical interconnects(2013-12) Zhang, Yang, active 2013; Chen, Ray T.Large on-chip bandwidths required for high performance electronic chips will render optical components essential parts of future on-chip interconnects. Silicon photonics enables highly integrated photonic integrated circuit (PIC) using CMOS compatible process. In order to maximize the bandwidth density and design flexibility of PICs, vertical integration of electronic layers and photonics layers is strongly preferred. Comparing deposited silicon, single crystalline silicon offers low material absorption loss and high carrier mobility, which are ideal for multi-layer silicon PIC. Three different methods to build multi-layer silicon PICs based on single crystalline silicon are demonstrated in this dissertation, including double-bonded silicon-on-insulator (SOI) wafers, transfer printed silicon nanomembranes, and adhesively bonded silicon nanomembranes. 1-to-12 waveguide fanouts using multimode interference (MMI) couplers were designed, fabricated and characterized on both double-bonded SOI and transfer printed silicon nanomembrane, and the results show comparable performance to similar devices fabricated on SOI. However, both of these two methods have their limitations in optical interconnects applications. Large and defect-free silicon nanomembrane fabricated using adhesive bonding is identified as a promising solution to build multi-layer silicon PICs. A double-layer structure constituted of vertically integrated silicon nanomembranes was demonstrated. Subwavelength length based fiber-to-chip grating couplers were used to couple light into this new platform. Three basic building blocks of silicon photonics were designed, fabricated and characterized, including 1) inter-layer grating coupler based on subwavelength nanostructure, which has efficiency of 6.0 dB and 3 dB bandwidth of 41 nm, for light coupling between layers, 2) 1-to-32 H-tree optical distribution, which has excess loss of 2.2 dB, output uniformity of 0.72 dB and 3 dB bandwidth of 880 GHz, 3) waveguide crossing utilizing index-engineered MMI coupler, which has crossing loss of 0.019 dB, cross talk lower than -40 dB and wide transmission spectrum covering C-band and L-band. The demonstrated integration method and silicon photonic devices can be integrated into the CMOS back-end process for clock distribution and global signaling.Item Near-infrared and mid-infrared integrated silicon devices for chemical and biological sensing(2014-12) Zou, Yi, active 21st century; Chen, Ray T.Silicon has been the material of choice of the photonics industry over the last decade due to its easy integration with silicon electronics as well as its optical transparency in the near-infrared telecom wavelengths. Besides these, it has very high refractive index, and also a broad optical transparency window over the entire mid-IR till about 8[Mu]m. Photonic crystal is well known that it can slow down the speed of light. It also can provide a universal platform for microcavity optical resonators with high quality factor Q and small modal volumes. The slow light effect, high Q and small modal volumes enhance light-matter interaction, together with high refractive index of silicon can be utilized to build a highly sensitive, high throughput sensor with small footprint. In this research, we have demonstrated highly compact and sensitive silicon based photonic crystal biosensor by engineering the photonic crystal microcavity in both cavity size and cavity-waveguide coupling condition. We have developed solutions to increase biosensor throughput by integrating multimode interference device and improving the coupling efficiency to a slow light photonic crystal waveguides. We have also performed detailed investigations on silicon based photonic devices at mid-infrared region to develop an ideal platform for highly sensitive optical absorption spectroscopy on chip. The studies have led to the demonstration of the first slot waveguide, the first photonic crystal waveguide, and the first holey photonic crystal waveguide and first slotted photonic crystal waveguide in silicon-on-sapphire at mid-infrared. The solutions and devices we developed in our research could be very useful for people to realize an integrated photonic circuit for biological and chemical sensing in the future.Item Silicon - polymer hybrid integrated microwave photonic devices for optical interconnects and electromagnetic wave detection(2015-05) Zhang, Xingyu, 1986-; Chen, Ray T.; Willson, Grant; Alu, Andrea; Akinwande, Deji; Poggio, EnricoThe accelerating increase in information traffic demands the expansion of optical access network systems that require high-performance optical and photonic components. In short-range communication links, optical interconnects have been widely accepted as a viable approach to solve the problems that copper based electrical interconnects have encountered in keeping up with the surge in the data rate demand over the last decades. Low cost, ease of fabrication, and integration capabilities of low optical-loss polymers make them attractive for integrated photonic applications to support futuristic data communication networks. In addition to passive wave-guiding components, electro-optic (EO) polymers consisting of a polymeric matrix doped with organic nonlinear chromophores have enabled wide-RF-bandwidth and low-power active photonic devices. Beside board level passive and active optical components, on-chip micro- or nano-photonic devices have been made possible by the hybrid integration of EO polymers onto the silicon platform. In recent years, silicon photonics have attracted a significant amount of attentions, because it offers compact device size and the potential of complementary metal–oxide–semiconductor (CMOS) compatible photonic integrated circuits. The combination of silicon photonics and EO polymers can enable miniaturized and high-performance hybrid integrated photonic devices, such as electro-optic modulators, optical interconnects, and microwave photonic sensors. Silicon photonic crystal waveguides (PCWs) exhibit slow-light effects which are beneficial for device miniaturization. Especially, EO polymer filled silicon slotted PCWs further reduce the device size and enhance the device performance by combining the best of these two systems. The potential applications of these silicon-polymer hybrid integrated devices include not only optical interconnects, but also optical sensing and microwave photonics. In this dissertation, the design, fabrication, and characterization of several types of silicon-polymer hybrid photonic devices will be presented, including EO polymer filled silicon PCW modulators for on-chip optical interconnects, antenna-coupled optical modulators for electromagnetic wave detections, and low-loss strip-to-slot PCW mode converters. In addition, some polymer-based devices and silicon-based photonic devices will also be presented, such as traveling wave electro-optic polymer modulators based on domain-inversion directional couplers, and silicon thermo-optic switches based on coupled photonic crystal microcavities. Furthermore, some microwave (or RF) components such as integrated broadband bowtie antennas for microwave photonic applications will be covered. Some on-going work or suggested future work will also be introduced, including in-device pyroelectric poling for EO polymer filled silicon slot PCWs, millimeter- or Terahertz-wave sensors based on EO polymer filled plasmonic slot waveguide, low-loss silicon-polymer hybrid slot photonic crystal waveguides fabricated by CMOS foundry, logic devices based on EO polymer microring resonators, and so on.Item Silicon integrated nanophotonic devices for on-chip optical interconnects(2012-05) Lin, Che-Yun; Chen, Ray T.; Bank, Seth R.; Willson, Carlton G.; Lee, Jack C.; Alu, Andrea; Wang, Alan X.Silicon is the dominant material in Microelectronics. Building photonic devices out of silicon can leverage the mature processing technologies developed in silicon CMOS. Silicon is also a very good waveguide material. It is highly transparent at 1550nm, and it has very high refractive index of 3.46. High refractive index enables building high index contrast waveguides with dimensions close to the diffraction limit. This provides the opportunity to build highly integrated photonic integrated circuit that can perform multiple functions on the same silicon chip, an optical parallel of the electronic integrated circuit. However, silicon does not have some of the necessary properties to build active optical devices such as lasers and modulators. For Example, silicon is an indirect band gap material that can’t be used to make lasers. The centro-symmetric crystal structure in silicon presents no electro-optic effect. By contrast, electro-optic polymer can be engineered to show very strong electro-optic effect up to 300pm/V. In this research we have demonstrated highly compact and efficient devices that utilize the strong optical confinement ability in silicon and strong electro-optic effect in polymer. We have performed detailed investigations on the optical coupling to a slow light waveguide and developed solutions to improve the coupling efficiency to a slow light photonic crystal waveguides (PCW). These studies have lead to the demonstration of the most hybrid silicon modulator demonstrate to date and a compact chip scale true time delay module that can be implemented in future phased array antenna systems. In the future, people may be able to realize a photonic integrated circuit for optical communication or sensor systems using the devices we developed in our research.Item Towards two dimensional optical beam steering with silicon nanomembrane-based optical phased arrays(2013-08) Kwong, David Nien; Chen, Ray T.Silicon based on-chip optical phased arrays are an enabling technology to achieving agile and compact large angle beam steering. In this work, a single layer array is presented, and approaches to multilayer 3D photonic integration for achieving a 2D array are also discussed. Finally, two dimensional optical beam steering is achieved using both thermo-optic and wavelength tuning. Various structures are considered as an alternative to the conventionally used shallow etched surface gratings to achieve narrow beam widths in the far field along with low switching power. The corrugated waveguide interspersed with 2D photonic crystal for crosstalk suppression is presented as a novel structure for coupling to free space that can provide lithographically defined index contrast in a single fabrication step, along with the smallest beam widths presented to date, at 0.25°. In addition, a polysilicon overlay with an oxide etch stop layer on top of a silicon waveguide is also presented as a grating coupler that achieves narrow far field beam widths. With this structure, two dimensional steering of 20° X 15° is demonstrated with a 16 element optical phased array, with a beam width of 1.2° X 0.4° and maximum power consumption of 20mW per channel.