Browsing by Subject "SHG"
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Item Nonlinear optical characterization of advanced electronic materials(2012-08) Lei, Ming, active 2012; Downer, Michael CoffinContinuous downscaling of transistor size has been the major trend of the semiconductor industry for the past half century. In recent years, however, fundamental physical limits to continued downscaling were encountered. In order to overcome these limits, the industry experimented --- and continues to experiment --- with many new materials and architectures. Non-invasive, in-line methods of characterizing critical properties of these structures are in demand. This dissertation develops optical second-harmonic generation (SHG) to characterize performance-limiting defects, band alignment or strain distribution in four advanced electronic material systems of current interest: (1) Hot carrier injection (HCI) is a key determinant of the reliability of ultrathin silicon-on-insulator (SOI) devices. We show that time-dependent electrostatic-field-induced SHG probes HCI from SOI films into both native and buried oxides without device fabrication. (2) Band offsets between advanced high-k gate dielectrics and their substrates govern performance-limiting leakage currents, and elucidate interfacial bond structure. We evaluate band offsets of as-deposited and annealed Al₂O₃, HfO₂ and BeO films with Si using internal photoemission techniques. (3) Epi-GaAs films grown on Si combine the high carrier mobility and superior optical properties of III-V semiconductors with the established Si platform, but are susceptible to formation of anti-phase boundary (APB) defects. We show that SHG in reflection from APB-laden epi-films is dramatically weaker than from control layers without APBs. Moreover, scanning SHG images of APB-rich layers reveal microstructure lacking in APB-free layers. These findings are attributed to the reversal in sign of the second-order nonlinear optical susceptibility [chi]⁽²⁾ between neighboring anti-phase domains, and demonstrate that SHG characterizes APBs sensitively, selectively and non-invasively. (4) 3D integration --- i.e. connecting vertically stacked chips with metal through-Si-vias (TSVs) --- is an important new approach for improving performance at the inter-chip level, but thermal stress of the TSVs on surrounding Si can compromise reliability. We present scanning SHG images for different polarization combinations and azimuthal orientations that reveal the sensitivity of SHG to strain fields surrounding TSVs. Taken together, these results demonstrate that SHG can identify performance-limiting defects and important material properties quickly and non-invasively for advanced MOSFET device applications.Item Optical second harmonic generation in bitumen films(2012-12) Roberts, Aaron Joseph; Downer, Michael CoffinThe ability of asphalt binders (bitumen) in road surfaces to self-heal after cracking is important to developing a robust transportation system that can tolerate heavy traffic and varying weather conditions. In order to develop improved binders, there is a need for noninvasive, in-situ, interface-specific methods of monitoring the kinetics, physics and chemistry of self-healing bitumen interfaces. Here the feasibility of using optical second-harmonic generation (SHG) by focused femtosecond laser pulses to monitor bitumen surfaces is demonstrated. SHG signals are observed in transmission through a sample composed of bitumen spin-coated onto a borosilicate microscope coverslip. The SHG signals are absent from uncoated coverslips, demonstrating that they originate from the bitumen layer. Further tests demonstrate that the bitumen-air surface makes the dominant contribution to the SHG signal. The SHG signal is observed to decay on a time scale comparable to typical self-healing times because of sample heating by the incident laser irradiation. Methods to control this effect by translating the sample during data acquisition are developed. Although the present results were obtained with a single incident wavelength (800 nm), they demonstrate the feasibility of probing bitumen interfaces spectroscopically with tunable light sources in order to monitor bond-specific chemical kinetics.Item Photocrosslinkable nonlinear optical polymers and directly-patternable polyimide dielectrics(2014-08) Bell, William Kenneth, III; Willson, C. Grant, 1939-; Ellison, Christopher; Anslyn, Eric; Ho, Paul; Keatinge-Clay, Adrian; Rose, MichaelThe development of high-efficiency nonlinear optical (NLO) polymers has opened up many opportunities in the field of electro-optics. However, current NLO polymers do not meet stability requirements for semiconductor integration. In an effort to improve this, we examined the effects of crosslinking following electric field poling. A series of photocrosslinkable polymers bearing side chain chromophores was synthesized, poled and evaluated on the basis of the thermal stability of Second Harmonic Generation. Photoinitiation allowed for control of the onset of curing. Crosslinking was monitored by FTIR and optimal conversion was achieved by applying a slow temperature ramp during exposure. The ultimate stability of the poled polymers was directly related to the number of crosslinking substituents attached to the chromophore pendant group. With two reactive groups per chromophore significant SHG was retained at temperatures beyond the polymer Tg. In integrated circuit packaging there is a need for directly-patternable polymers of low dielectric constant. Bridging the gap between the high-value silicon chip and circuit board is a substrate comprising alternating layers of metal conductor and polymer dielectric. PMDA-ODA, an aromatic polyimide, meets many of the requirements for integration and can be patterned using a photobase generator (PBG). Due to absorbance by the PMDA-ODA precursor, this PBG must have activity at visible wavelengths. Several oxime urethanes were synthesized and evaluated as candidate long wavelength PBG. These compounds exhibit clean photochemistry and high visible light sensitivity. Unfortunately, carbamate thermal stability is insufficient for patterning PMDA-ODA. For improved material properties, PMDA-TFMB, a fluorinated polyimide, was also evaluated. Importantly, the polymer precursor is sufficiently transparent to employ thermally-stable near-UV photobases. With photobase, 2.5 micron features were resolved in PMDA-TFMB. An ancillary benefit of this methodology is reduced cure temperature (~200 °C), a traditional drawback of polyimides. This material demonstrates a dielectric constant near 3 and a thermal expansion coefficient (CTE) of approximately 6 ppm/°C in-plane. Through-plane thermal expansion is somewhat problematic, with a CTE of approximately 160 ppm/°C, and will likely require a nanoparticle composite strategy. However, this combination of material and lithographic properties make PMDA-TFMB a promising candidate for this application.Item The Impact of Extracellular Matrix Stiffness on Angiogensis(2012-12-06) Lee, Po-Feng 1976-Sprouting endothelial cells (ECs) use soluble and insoluble cues to guide migration and expand the existing vascular network to meet changing trophic needs of the tissue during angiogenesis. A noninvasive and non-destructive nonlinear optical microscopy (NLOM) technique was used to optically image endothelial sprouting morphogenesis in three dimensional (3D) collagen matrices with simultaneously captured signals from collagen fibers and endothelial cells using second harmonic generation (SHG) and two-photon excited fluorescence (TPF), respectively. Sprout advancement and lumen expansion companying with ECM alteration were the synergistic results of membrane-associated matrix metalloproteinase and cell traction evidenced by proteinase inhibition and Rho-associated kinase (p160ROCK) inhibition experiments. These physical EC-ECM interactions suggest that ECM mechanical properties may influence angiogenic responses. In a 3D angiogenesis model, we measure angiogenic responses as a function of collagen matrix stiffness by inducing collagen cross-linking with microbial transglutaminase (mTG). Collagen matrices stiffen with both mTG treatment and incubation time as evidenced with biaxial mechanical test results and collagen TPF intensity increases with mTG treatment and that the ratio of TPF/SHG correlates with biaxial tested mechanical stiffness. SHG and optical coherence microscopy (OCM) are further used to show that other physical properties of the matrix do not change with mTG treatment, thus providing the same density but different stiffness with which to measure angiogenic responses. Stiffer matrices promote angiogenesis with more invading sprouts that invade deeper. No differences in lumen size were observed between control and mTG stiffened 3D cultures, but there was evidence of greater matrix remodeling in stiffer gels using NLOM. Results of this study show angiogenic responses are enhanced with increasing stiffness and suggest that these properties may be used in tissue engineering and regenerative medicine applications to engineer angiogenesis.