Browsing by Subject "Nanofabrication"
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Item Laser-assisted scanning probe alloying nanolithography (LASPAN) and its application in gold-silicon system(2009-05-15) Peng, LuohanNanoscale science and technology demand novel approaches and new knowledge to further advance. Nanoscale fabrication has been widely employed in both modern science and engineering. Micro/nano lithography is the most common technique to deposit nanostructures. Fundamental research is also being conducted to investigate structural, physical and chemical properties of the nanostructures. This research contributes fundamental understanding in surface science through development of a new methodology. Doing so, experimental approaches combined with energy analysis were carried out. A delicate hardware system was designed and constructed to realize the nanometer scale lithography. We developed a complete process, namely laser-assisted scanning probe alloying nanolithography (LASPAN), to fabricate well-defined nanostructures in gold-silicon (Au-Si) system. As a result, four aspects of nanostructures were made through different experimental trials. A non-equilibrium phase (AuSi3) was discovered, along with a non-equilibrium phase diagram. Energy dissipation and mechanism of nanocrystalization in the process have been extensively discussed. The mechanical energy input and laser radiation induced thermal energy input were estimated. An energy model was derived to represent the whole process of LASPAN.Item Nanoengineering of surfaces to modulate cell behavior : nanofabrication and the influence of nanopatterned features on the behavior of neurons and preadipocytes(2009-08) Fozdar, David Yash; Chen, ShaochenPromising strategies for treating diseases and conditions like cancer, tissue necrosis from injury, congenital abnormalities, etc., involve replacing pathologic tissue with healthy tissue. Strategies devoted to the development of tissue to restore, maintain, or improve function is called tissue engineering. Engineering tissue requires three components, cells that can proliferate to form tissue, a microenvironment that nourishes the cells, and a tissue scaffold that provides mechanical stability, controls tissue architecture, and aids in mimicking the cell’s natural extracellular matrix (ECM). Currently, there is much focus on designing scaffolds that recapitulate the topology of cells’ ECM, in vivo, which undoubtedly wields structures with nanoscale dimensions. Although it is widely thought that sub-microscale features in the ECM have the greatest vii impact on cell behavior relative to larger structures, interactions between cells and nanostructures surfaces is not well understood. There have been few comprehensive studies elucidating the effects of both feature dimension and geometry on the initial formation and growth of the axons of individual neurons. Reconnecting the axons of neurons in damaged nerves is vital in restoring function. Understanding how neurons react with nanopatterned surfaces will advance development of optimal biomaterials used for reconnecting neural networks Here, we investigated the effects of micro- and nanostructures of various sizes and shape on neurons at the single cell level. Compulsory to studying interactions between cells and sub-cellular structures is having nanofabrication technologies that enable biomaterials to be patterned at the nanoscale. We also present a novel nanofabrication process, coined Flash Imprint Lithography using a Mask Aligner (FILM), used to pattern nanofeatures in UV-curable biomaterials for tissue engineering applications. Using FILM, we were able to pattern 50 nm lines in polyethylene glycol (PEG). We later used FILM to pattern nanowells in PEG to study the effect of the nanowells on the behavior preadipocytes (PAs). Results of our cell experiments with neurons and PAs suggested that incorporating micro- and nanoscale topography on biomaterial surfaces may enhance biomaterials’ ability to constrain cell development. Moreover, we found the FILM process to be a useful fabrication tool for tissue engineering applications.Item Nanofabrication via directed assembly: a computational study of dynamics, design & limits(2016-08) Arshad, Talha Ali; Bonnecaze, R. T. (Roger T.); Ellison, Christopher J.; Ganesan, Venkat; Sreenivasan, S. V.; Willson, Carlton G.Three early-stage techniques, for the fabrication of metallic nanostructures, creation of controlled topography in polymer films and precise deposition of nanowires are studied. Mathematical models and computational simulations clarify how interplay of multiple physical processes drives dynamics, provide a rational approach to selecting process parameters targeting specific structures efficiently and identify limits of throughput and resolution for each technique. A topographically patterned membrane resting on a film of nanoparticles suspended in a solvent promotes non-uniform evaporation, driving convection which accumulates particles in regions where the template is thin. Left behind is a deposit of particles the dimensions of which can be controlled through template thickness and topography as well as film thickness and concentration. Particle distribution is shown to be a competition between convection and diffusion represented by the Peclet number. Analytical models yield predictive expressions for bounds within which deposit dimensions and drying time lie. Ambient evaporation is shown to drive convection strong enough to accumulate particles 10 nm in diameter. Features up to 1 µm high with 10 nm residual layers can be deposited in < 3 minutes, making this a promising approach for continuous, single-step deposition of metallic nanostructures on flexible substrates. Selective exposure of a polystyrene film to UV radiation has been shown to result in non-uniform surface energy which drives convection on thermal annealing, forming topography. Film dynamics are shown to be a product of interplay between Marangoni convection, capillary dissipation and diffusion. At short times, secondary peaks form at double the pattern density of the mask, while at long times pattern periodicity follows the mask. Increased temperature, larger surface tension differentials and thick films result in faster dynamics and larger features. Electric fields in conjunction with fluid flow can be used to position semi-conducting nanowires or nanotubes at precise locations on a substrate. Nanowires are captured successfully if they arrive within a region next to the substrate where dielectrophoresis dominates hydrodynamics. Successful assembly is predicated upon a favorable balance of hydrodynamics, dielectrophoresis and diffusion, represented by two dimensionless groups. Nanowires down to 20 nm in length can be assembled successfully.Item NANOMATERIALS TO BIOSENSORS: A BENCH-TOP RAPID PROTOTYPING APPROACH(2010-07-14) Liao, Wei-SsuNanofabrication has received substantial interest from scientists and engineers because of its potential applications in many fields. This was because nanoscale structures have unique properties that cannot be observed or utilized at other size scales. Our living environment and many of our daily necessities had been strongly influenced by these techniques. Computers, electronics, housewares, vehicles, and medical care are now all affected by this explosive nanotechnology. However, traditional methods in controlling nanoscale features and their properties were often time-consuming and expensive. The objective of my research was to design, fabricate, and test nanostructure platforms using a unique toolbox of bottom-up lithographic techniques recently developed in our laboratory. These novel methods can be utilized for the rapid prototyping of nanoscale patterns in a much easier and more economical way. Specifically, we also focused on applying these nanoscale patterns as sensor platforms. These platforms were easily produced with our unique methods, and provide ultra sensitive capability to detect diverse chemical or biological species. The demonstration of capabilities and applications of our unique technologies includes the following projects. Chapters II and III describe a simple, inexpensive, and rapid method for making metal nanoparticles ranging between 10 nm and 100 nm in size through metal photoreduction with templates. The process can be completed in approximately 11 minutes without the use of a clean room environment or vacuum techniques. A simple label-free biosensor fabrication method based on transmission localized surface plasmon resonance (T-LSPR) of this platform is also demonstrated. Chapters IV and V present a nanoscale patterning technique for creating diverse features in polymers and metals. The process works by combining evaporative ring staining with a colloidal templating process. Well-ordered hexagonally arrayed nanorings, double rings, triple rings, targets, and holes were all easily prepared. A line width as thin as ~15 nm can repeatably be performed with this technology. Finally, Chapter VI demonstrates an ultra-sensitive plasmonic optical device based on hexagonal periodic nanohole metal films produced through our evaporative templating technique. The optical properties of these sub-wavelength periodic hole array metal films are discussed.Item Simulation of UV nanoimprint lithography on rigid and flexible substrates(2016-12) Jain, Akhilesh; Bonnecaze, R. T. (Roger T.); Sreenivasan, S.V.; Willson, C. Grant; Schunk, P. Randall; Ganesan, VenkatNanoimprint lithography (NIL) is a low cost, high throughput process used to replicate sub-20 nm feature from a patterned template to a rigid or flexible substrate. Various configurations for NIL are analyzed and classified based on type of template and substrate. The steps involved in pattern transfer using roller template based NIL are identified and models to study these steps are proposed. Important process parameters such as maximum web speed possible, required UV intensity, minimum droplet size and pitch and required force on the roller are calculated. The advantages, disadvantages and optimal process window for the different configurations are identified. Droplet spreading is simulated in NIL with rigid substrates in order to study the effect of droplet size, droplet placement error, gas diffusion and template pattern on throughput and defectivity. Square arrangement is found to be the optimum arrangement for achieving minimum throughput. Large droplet-free regions on the substrate edge and error in droplet placement error have significant impact on the throughput. A fluid flow model with average flow permeability is presented to account for flow in the template patterns. Optimum droplet dispensing for multi-patterned templates is achieved by distributing droplet volume according to local filling requirements. Non-fill defects in NIL are classified into pocket, edge and channel defects. A model to predict the size of non-fill defects based on imprint time and droplet size is presented. Defect characterization is presented for various pattern-types. A model is presented to determine the time required for the encapsulated gas to diffuse into the resist. The coupled fluid-structure interaction in NIL with flexible substrate is studied by simulating the web deformation as the droplet spreads on the substrate. It is found that the flexible substrate can be modeled as a membrane due to the lack of rigidity. RLT variation reduces as the number of droplets or the web tension increases. For the magnitude of RLT variation, thinner residual layers require higher web tension. The position of the template on the substrate is important and template positioned at the corner of the substrate is found to provide the least RLT variation.