Willson, C. G. (C. Grant), 1939-570702552008-08-282017-05-112008-08-282017-05-112002http://hdl.handle.net/2152/1001textelectronicengCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.Microlithography--MaterialsPolymersThesis3086720