Observations while attempting to fabricate a micro-electron detection system

Overzet, LawrenceGoeckner, Matthew2017-03-312018-02-162017-03-312018-02-162017-03-312016-12http://hdl.handle.net/10735.1/5355Microelectromechanical systemsElectrons—EmissionHydrofluoric acidChemical reactionsMechanical chemistryPhotolithographyObservations while attempting to fabricate a micro-electron detection systemThesis