Characterization of fluorinated hydrogenated amorphous silicon nitride alloys

Unrestricted.2016-11-142011-02-182016-11-141995-08http://hdl.handle.net/2346/20791Not availableapplication/pdfengAbsorption spectraSilicon -- Defects -- SpectraAmoarphous semiconductors -- Defects -- SpectraCharacterization of fluorinated hydrogenated amorphous silicon nitride alloysDissertation