Mullins, C.B.2017-01-302018-01-222017-01-302018-01-222007-12http://hdl.handle.net/2152/44575This thesis discusses the construction and modification of an ultra-high vacuum chamber (UHV) and associated instruments for the study of thin film materials prepared by reactive ballistic deposition. In addition to hardware design and construction, the fabrication of an electron beam evaporator and its associated controls, along with an application of a computer based lock in amplification routine to Auger Electron Spectroscopy are discussed.electronicengCopyright © is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.Ultra high vacuum chamber (UHV)Thin film materialsReactive ballistic depositionThesisRestricted