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dc.contributor.advisorWillson, C. G. (C. Grant), 1939-en
dc.identifier.oclc166395621en
dc.creatorTaylor, James Christopheren
dc.date.accessioned2008-08-28T23:23:49Zen
dc.date.accessioned2017-05-11T22:17:40Z
dc.date.available2008-08-28T23:23:49Zen
dc.date.available2017-05-11T22:17:40Z
dc.date.issued2007en
dc.identifierb68669343en
dc.identifier.urihttp://hdl.handle.net/2152/3040en
dc.descriptiontexten
dc.format.mediumelectronicen
dc.language.isoengen
dc.rightsCopyright is held by the author. Presentation of this material on the Libraries' web site by University Libraries, The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works.en
dc.subject.lcshLithographyen
dc.subject.lcshPhotoresistsen
dc.subject.lcshPhotonic crystalsen
dc.titleAdvanced lithographic patterning technologies: materials and processesen
dc.description.departmentChemical Engineeringen
dc.type.genreThesisen


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