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dc.contributorLiang, Hong
dc.contributorTeizer, Winfried
dc.creatorPeng, Luohan
dc.date.accessioned2010-01-15T00:11:46Z
dc.date.accessioned2010-01-16T01:12:47Z
dc.date.accessioned2017-04-07T19:55:49Z
dc.date.available2010-01-15T00:11:46Z
dc.date.available2010-01-16T01:12:47Z
dc.date.available2017-04-07T19:55:49Z
dc.date.created2008-08
dc.date.issued2009-05-15
dc.identifier.urihttp://hdl.handle.net/1969.1/ETD-TAMU-3021
dc.description.abstractNanoscale science and technology demand novel approaches and new knowledge to further advance. Nanoscale fabrication has been widely employed in both modern science and engineering. Micro/nano lithography is the most common technique to deposit nanostructures. Fundamental research is also being conducted to investigate structural, physical and chemical properties of the nanostructures. This research contributes fundamental understanding in surface science through development of a new methodology. Doing so, experimental approaches combined with energy analysis were carried out. A delicate hardware system was designed and constructed to realize the nanometer scale lithography. We developed a complete process, namely laser-assisted scanning probe alloying nanolithography (LASPAN), to fabricate well-defined nanostructures in gold-silicon (Au-Si) system. As a result, four aspects of nanostructures were made through different experimental trials. A non-equilibrium phase (AuSi3) was discovered, along with a non-equilibrium phase diagram. Energy dissipation and mechanism of nanocrystalization in the process have been extensively discussed. The mechanical energy input and laser radiation induced thermal energy input were estimated. An energy model was derived to represent the whole process of LASPAN.
dc.language.isoen_US
dc.subjectNanofabrication
dc.subjectgold
dc.subjectsilicon
dc.subjectnanolithography
dc.subjectSPM
dc.subjectalloy
dc.titleLaser-assisted scanning probe alloying nanolithography (LASPAN) and its application in gold-silicon system
dc.typeBook
dc.typeThesis


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